Purge and pumping structures arranged beneath substrate plane to reduce defects

ABSTRACT

A substrate processing system includes a processing chamber including a top surface, a bottom surface and side walls. A substrate support is arranged in the processing chamber to support a substrate during processing. A purge structure is arranged in the processing chamber below a plane occupied by the substrate during processing. The purge structure includes a first plurality of holes configured to supply purge gas to purge an area between the substrate support and the bottom surface of the processing chamber.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.14/872,513 filed on Oct. 1, 2015. The entire disclosure of theapplication referenced above is incorporated herein by reference.

FIELD

The present disclosure relates to substrate processing systems, and moreparticularly to purge structures and/or pumping structures arrangedbeneath a substrate plane to reduce defects.

BACKGROUND

The background description provided here is for the purpose of generallypresenting the context of the disclosure. Work of the presently namedinventors, to the extent it is described in this background section, aswell as aspects of the description that may not otherwise qualify asprior art at the time of filing, are neither expressly nor impliedlyadmitted as prior art against the present disclosure.

Substrate processing systems for performing deposition and/or etchingtypically include a processing chamber, a gas distribution device suchas a showerhead and a substrate support. A substrate such as asemiconductor wafer may be arranged on the substrate support. Duringprocessing, different gas mixtures may be introduced into the processingchamber and then evacuated. The process is repeated multiple times todeposit film, to etch the substrate or to perform other substratetreatment. In some substrate processing systems, radio frequency (RF)plasma may be used to activate chemical reactions.

Some substrate processing systems use a reaction zone between thesubstrate and the gas distribution device. The reaction zone may beisolated from a large processing chamber volume using a gas curtain. Thelarge chamber volume helps to mitigate parasitic coupling to groundedprocessing chamber walls (due to the increased distance). However, thelarge chamber volume also has dead volumes that can accumulateparticles, which may increase defects.

SUMMARY

A substrate processing system includes a processing chamber including atop surface, a bottom surface and side walls. A substrate support isarranged in the processing chamber to support a substrate duringprocessing. A purge structure is arranged in the processing chamberbelow a plane occupied by the substrate during processing. The purgestructure includes a first plurality of holes configured to supply purgegas to purge an area between the substrate support and the bottomsurface of the processing chamber.

In other features, the first plurality of holes directs purge gas in adownwardly direction towards the bottom surface of the processingchamber. The first plurality of holes directs purge gas in a downwardlyand radially outwardly direction. The purge structure is connected to abottom surface of the substrate support. The purge structure includes abody and a plenum defined in the body. The first plurality of holes isformed in the body and is in fluid communication with the plenum.

In other features, the purge structure includes a body and a cavitydefined in the body. The first plurality of holes is formed in the bodyand is in fluid communication with the cavity. The cavity and a bottomsurface of the substrate support form a plenum.

In other features, the purge structure includes an elongate member thatis attached to a bottom surface of the substrate support. The substratesupport includes a central supporting member connecting the substratesupport to the bottom surface of the processing chamber. The processingchamber further includes exhaust pumping ports.

In other features, a pumping structure arranged below the substratesupport and around the central supporting member. The pumping structureincludes a second plurality of holes for controlling flow from theprocessing chamber through the pumping structure to the exhaust pumpingports.

In other features, the pumping structure includes a first portionarranged around the central supporting member and a second portionconnected to the first portion and extending from the first portion tothe side walls of the processing chamber. The second plurality of holesof the pumping structure is arranged at spaced locations on the secondportion.

In other features, the first portion includes a cylindrical portion andthe second portion includes a planar portion.

In other features, the planar portion has a cross-section to mate with abottom portion of the processing chamber and to define a first volume influid communication with a reaction zone and second volume in fluidcommunication with vacuum. The first plurality of holes fluidly connectthe first volume with the second volume.

In other features, a heater heats the purge structure to a predeterminedtemperature. A heater heats the pumping structure to a predeterminedtemperature.

A substrate processing system includes a processing chamber including atop surface, a bottom surface and side walls and exhaust pumping ports.A substrate support is arranged in the processing chamber to support asubstrate during processing, wherein the substrate support includes acentral supporting member connecting the substrate support to the bottomsurface of the processing chamber. A pumping structure is arranged inthe processing chamber below the substrate support and around thecentral supporting member. The pumping structure includes a firstplurality of holes for controlling flow from the processing chamberthrough the pumping structure to the exhaust pumping ports.

The pumping structure includes a first portion arranged around thecentral supporting member and a second portion connected to the firstportion and extending from the first portion to the side walls of theprocessing chamber. The first plurality of holes of the pumpingstructure is arranged at spaced locations on the second portion.

In other features, the first portion includes a cylindrical portion andthe second portion includes a planar portion. The planar portion has across-section to mate with a bottom portion of the processing chamberand to define a first volume in fluid communication with a reaction zoneand second volume in fluid communication with vacuum. The firstplurality of holes fluidly connects the first volume with the secondvolume.

In other features, a heater heats the pumping structure to apredetermined temperature.

In other features, a purge structure is arranged in the processingchamber below a plane defined by the substrate during processing. Thepurge structure includes a plenum and a second plurality of holesconfigured to flow purge gas from the plenum through the secondplurality of holes to purge an area between the substrate support andthe bottom surface of the processing chamber.

Further areas of applicability of the present disclosure will becomeapparent from the detailed description, the claims and the drawings. Thedetailed description and specific examples are intended for purposes ofillustration only and are not intended to limit the scope of thedisclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure will become more fully understood from thedetailed description and the accompanying drawings, wherein:

FIG. 1 is a functional block diagram and partial side cross-sectionalview of an example of a substrate processing system including a purgestructure arranged beneath a substrate support according to the presentdisclosure;

FIG. 2 is a side cross-sectional view another example of a purgestructure according to the present disclosure;

FIG. 3A is a plan view of a bottom of a lower electrode illustratinganother example of a purge structure according to the presentdisclosure;

FIGS. 3B and 3C are side cross-sectional views of examples of the purgestructure in FIG. 3A;

FIG. 4 is a side cross-sectional view of an example of a substrateprocessing chamber including a purge structure and a pumping structurearranged beneath a substrate support according to the presentdisclosure; and

FIG. 5 is a perspective view of the pumping structure of FIG. 4.

In the drawings, reference numbers may be reused to identify similarand/or identical elements.

DETAILED DESCRIPTION

Typically, there are two dead volumes in processing chambers. One deadvolume is located above a horizontal plane of the gas distributiondevice. Another dead volume is located below a horizontal planeincluding the substrate. The dead volume above the plane of the gasdistribution device may be managed by purge gas emanating from a collararranged on a stem of the gas distribution device. The gas curtainprevents back-streaming of reaction gases from the reaction zone, whichreduces particle accumulation. The substrate processing system accordingto the present disclosure includes a purge structure and/or a pumpingstructure located in the dead volume beneath the substrate.

Referring now to FIG. 1, an example substrate processing system 1 isshown. While the foregoing example will be described in the context ofplasma enhanced atomic layer deposition (PEALD), the present disclosuremay be applied to other substrate processing systems such as chemicalvapor deposition (CVD), PECVD, ALE, ALD, PEALE or other substratetreatment. The substrate processing system 1 includes a processingchamber 2 that encloses other components of the substrate processingsystem 1 and contains the RF plasma (if used). The processing chamber 2includes a top surface, a bottom surface, and side surfaces.

The substrate processing system 1 includes an upper electrode 4 and asubstrate support 6. In some examples, the substrate support 6 includesan electrostatic chuck. During operation, a substrate 8 is arranged onthe substrate support 6. The substrate support 6 may include a centralcolumn or supporting member 7 connecting the substrate support 6 in aspaced relationship relative to the bottom surface of the processingchamber 2.

For example only, the upper electrode 4 may include a gas distributiondevice 9 such as a showerhead that introduces and distributes processgases. The gas distribution device 9 may include a stem portionincluding one end connected to a top surface of the processing chamber.A base portion is generally cylindrical and extends radially outwardlyfrom an opposite end of the stem portion at a location that is spacedfrom the top surface of the processing chamber. A substrate-facingsurface or faceplate of the base portion of the showerhead includes aplurality of holes through which process gas or purge gas flows.Alternately, the upper electrode 4 may include a conducting plate andthe process gases may be introduced in another manner.

In some examples, the substrate support 6 may include a lower electrode10. The lower electrode 10 may support a heating plate 12, which maycorrespond to a ceramic multi-zone heating plate. A thermal resistancelayer 14 may be arranged between the heating plate 12 and the lowerelectrode 10. The lower electrode 10 may include one or more coolantchannels 16 for flowing coolant through the lower electrode 10.

An RF generating system 20 generates and outputs an RF voltage to one ofthe upper electrode 4 and the lower electrode 10. The other one of theupper electrode 4 and the lower electrode 10 may be DC grounded, ACgrounded or floating. For example only, the RF generating system 20 mayinclude an RF generator 22 that generates RF power that is fed by amatching and distribution network 24 to the upper electrode 4 or thelower electrode 10. In other examples, the plasma may be generatedinductively or remotely.

A gas delivery system 30 includes one or more gas sources 32-1, 32-2, .. . , and 32-N (collectively gas sources 32), where N is an integergreater than zero. The gas sources 32 are connected by valves 34-1,34-2, . . . , and 34-N (collectively valves 34) and mass flowcontrollers 36-1, 36-2, . . . , and 36-N (collectively mass flowcontrollers 36) to a manifold 40.

A temperature controller 42 may be connected to a plurality of thermalcontrol elements (TCEs) 44 arranged in the heating plate 12. Thetemperature controller 42 may be used to control the plurality of TCEs44 to control a temperature of the substrate support 6 and the substrate8. The temperature controller 42 may communicate with a coolant assembly46 to control coolant flow through the channels 16. For example, thecoolant assembly 46 may include a coolant pump and reservoir. Thetemperature controller 42 operates the coolant assembly 46 toselectively flow the coolant through the channels 16 to cool thesubstrate support 6.

A valve 50 and pump 52 may be used to evacuate reactants from theprocessing chamber 2. A system controller 60 may be used to controlcomponents of the substrate processing system 1. A robot 70 may be usedto deliver substrates onto, and remove substrates from, the substratesupport 6. For example, the robot 70 may transfer substrates between thesubstrate support 6 and a load lock 72.

A purge structure 73 such as a collar with slots may be used to providepurge gas in an area 74 above a showerhead. A purge gas source 75 and avalve 77 supply the purge gas to the purge structure 73. The systemcontroller 60 may be used to control the valve 77. Suitable purgestructures are shown and described in commonly-assigned U.S. patentapplication Ser. No. 13/659,231, filed on Oct. 24, 2012 and entitled“Suppression of Parasitic Deposition in a Substrate Processing System BySuppressing Precursor Flow and Plasma Outside of Substrate Region”,which is hereby incorporated by reference in its entirety.

A purge structure 84 according to the present disclosure provides purgegas in an area 79 below the substrate support 6. A purge gas source 80supplies purge gas via a valve 82 to the purge structure 84. In someexamples, the system controller 60 controls the valve 82. The purgestructure 84 includes a plenum 86 in fluid communication with aplurality of holes 88. In some examples, the purge structure 84 includesan annular body 87 and the plenum 86 has an annular shape.

As the purge gas is supplied into the plenum 86, pressure increases inthe plenum 86 and the purge gas flows through the plurality of holes 88into the dead volume beneath the substrate support 6. In some examples,the plurality of holes 88 is directed downwardly in a directionperpendicular to a plane occupied by the substrate 8. In other examples,the plurality of holes 88 is directed downwardly and radially outwardlyat an angle between a first direction perpendicular to the plane of thesubstrate 8 and a second direction parallel to the plane of thesubstrate 8 (as shown).

A temperature of the purge structure 84 may be controlled by thetemperature controller 42. In some examples, the temperature of thepurge structure 84 may be sensed using a sensor (not shown) and fed backto the temperature controller 42. In other examples, open-loop controlof heat supplied to the purge structure 84 can be used. For exampleonly, a film heater 89 may be arranged between the purge structure 84and the bottom surface of the lower electrode 10 (or on another surfaceof the purge structure 84), although other types of heaters may be used.

Referring now to FIG. 2, another example of a purge structure 90according to the present disclosure is shown. The purge structure 90defines a plenum 92 in conjunction with a bottom surface of the lowerelectrode 10. A plurality of holes 93 supplies purge gas from the plenum92 to the area 76 beneath the substrate support 6. The plurality ofholes 93 may be directed downwardly or downwardly and radially outwardlyas described above.

In some examples, “O”-rings 95 and 96 may be arranged in slots 94 formedin the bottom surface of the lower electrode 10 and the purge structure90 to provide a seal. In addition, fasteners 97 may also be used to holdthe plenum 92 against the bottom surface of the lower electrode 10.Purge gas is supplied via the valve 82 and one or more passages 98 tothe plenum 92. While a specific arrangement of fasteners, slots and“O”-rings is disclosed, other arrangements can be used to seal theplenum 92 against the bottom surface of the lower electrode 10. A heater99 may be used to heat the purge structure 90 as described above.

Referring now to FIG. 3A-3C, another example of a purge structure 100according to the present disclosure is shown. The purge structure 100includes an elongate member such as a tube including a plurality ofholes 104 on a bottom-facing surface thereof. For example only, theannular tube can be in the form of a continuous or discontinuous ring.While a circular cross-section may be used, other cross-sections such assquare, elliptical rectangular, etc. may be used as shown in theexamples in FIGS. 3B and 3C. In some examples, the purge structure 100is attached to the bottom surface of the lower electrode 10 usingfasteners 106 or another attachment mechanism. The plurality of holes104 in the purge structure may be directed downwardly or downwardly andoutwardly as described above. A heater 108 may be used to heat the purgestructure 100.

Referring now to FIGS. 4 and 5, a substrate processing chamber 110includes the purge structure 84 described above and/or a pumpingstructure arranged beneath the substrate support. In FIG. 4, processgas, purge gas and electrical connections for an upper portion of theprocessing chamber are generally identified at 112. A collar 114including a plurality of slots 116 may be used to supply purge gas in anarea 118 located between a showerhead 120 and an upper surface of theprocessing chamber.

Process gas is supplied to an area between the showerhead 120 and asubstrate arranged on a substrate support 122. Process gas, purge gasand electrical connections for a lower portion of the processing chamberare located in the center column 7. The purge structure 84 and a pumpingstructure 138 may be used to help control gas flow in a volume 136 belowthe substrate support 122 as will be described further below.

The pumping structure 138 divides the volume 136 into an upper volume136-1 located above the pumping structure 138 and a lower volume 136-2located below the pumping structure 138. The upper volume 136-1 receivesprocess gas, purge gas and process reactants from a process beingperformed in the processing chamber. The pumping structure 138 includesa plurality of holes 140 to draw gas flow from the upper volume 136-1 tothe lower volume 136-2. The lower volume 136-2 is in fluid communicationwith exhaust openings, which are connected to a vacuum source and areused to remove reactants from the processing chamber.

In FIG. 5, an example of the pumping structure 138 is shown to include afirst portion 150 that is connected to a second portion 152. The firstportion 150 may be connected generally perpendicular to the secondportion 152. The first portion 150 may have a generally cylindricalshape. The second portion 152 may be planar and may have afootball-shaped cross section and a center opening 156. The plurality ofholes 140 may be arranged on the second portion 152 arranged at aplurality of spaced locations around the second portion 152. While aspecific football-shaped structure is shown, the pumping structure 138may have circular, elliptical, rectangular, or any suitable shape thatmates with an inner surface of the processing chamber to provide theseparate volumes 136-1 and 136.2.

The dead zone located beneath the substrate support was not previouslyactively purged and surfaces in this region tend to be cooler than thesubstrate support. Therefore, there was a potential for enhancedprecursor adsorption and reaction with oxidizing or clean gas radicalswith long mean free paths. As a result, parasitic oxide or CF_(x) typeformation occurred. The non-volatile residues build up over time and mayincrease substrate defects.

The purging structure and/or pumping structures according to the presentdisclosure help to manage a conductance path for reactive species, whichreduces defects and improves wafer uniformity.

The foregoing description is merely illustrative in nature and is in noway intended to limit the disclosure, its application, or uses. Thebroad teachings of the disclosure can be implemented in a variety offorms. Therefore, while this disclosure includes particular examples,the true scope of the disclosure should not be so limited since othermodifications will become apparent upon a study of the drawings, thespecification, and the following claims. It should be understood thatone or more steps within a method may be executed in different order (orconcurrently) without altering the principles of the present disclosure.Further, although each of the embodiments is described above as havingcertain features, any one or more of those features described withrespect to any embodiment of the disclosure can be implemented in and/orcombined with features of any of the other embodiments, even if thatcombination is not explicitly described. In other words, the describedembodiments are not mutually exclusive, and permutations of one or moreembodiments with one another remain within the scope of this disclosure.

Spatial and functional relationships between elements (for example,between modules, circuit elements, semiconductor layers, etc.) aredescribed using various terms, including “connected,” “engaged,”“coupled,” “adjacent,” “next to,” “on top of,” “above,” “below,” and“disposed.” Unless explicitly described as being “direct,” when arelationship between first and second elements is described in the abovedisclosure, that relationship can be a direct relationship where noother intervening elements are present between the first and secondelements, but can also be an indirect relationship where one or moreintervening elements are present (either spatially or functionally)between the first and second elements. As used herein, the phrase atleast one of A, B, and C should be construed to mean a logical (A OR BOR C), using a non-exclusive logical OR, and should not be construed tomean “at least one of A, at least one of B, and at least one of C.”

In some implementations, a controller is part of a system, which may bepart of the above-described examples. Such systems can comprisesemiconductor processing equipment, including a processing tool ortools, chamber or chambers, a platform or platforms for processing,and/or specific processing components (a wafer pedestal, a gas flowsystem, etc.). These systems may be integrated with electronics forcontrolling their operation before, during, and after processing of asemiconductor wafer or substrate. The electronics may be referred to asthe “controller,” which may control various components or subparts ofthe system or systems. The controller, depending on the processingrequirements and/or the type of system, may be programmed to control anyof the processes disclosed herein, including the delivery of processinggases, temperature settings (e.g., heating and/or cooling), pressuresettings, vacuum settings, power settings, radio frequency (RF)generator settings, RF matching circuit settings, frequency settings,flow rate settings, fluid delivery settings, positional and operationsettings, wafer transfers into and out of a tool and other transfertools and/or load locks connected to or interfaced with a specificsystem.

Broadly speaking, the controller may be defined as electronics havingvarious integrated circuits, logic, memory, and/or software that receiveinstructions, issue instructions, control operation, enable cleaningoperations, enable endpoint measurements, and the like. The integratedcircuits may include chips in the form of firmware that store programinstructions, digital signal processors (DSPs), chips defined asapplication specific integrated circuits (ASICs), and/or one or moremicroprocessors, or microcontrollers that execute program instructions(e.g., software). Program instructions may be instructions communicatedto the controller in the form of various individual settings (or programfiles), defining operational parameters for carrying out a particularprocess on or for a semiconductor wafer or to a system. The operationalparameters may, in some embodiments, be part of a recipe defined byprocess engineers to accomplish one or more processing steps during thefabrication of one or more layers, materials, metals, oxides, silicon,silicon dioxide, surfaces, circuits, and/or dies of a wafer.

The controller, in some implementations, may be a part of or coupled toa computer that is integrated with the system, coupled to the system,otherwise networked to the system, or a combination thereof. Forexample, the controller may be in the “cloud” or all or a part of a fabhost computer system, which can allow for remote access of the waferprocessing. The computer may enable remote access to the system tomonitor current progress of fabrication operations, examine a history ofpast fabrication operations, examine trends or performance metrics froma plurality of fabrication operations, to change parameters of currentprocessing, to set processing steps to follow a current processing, orto start a new process. In some examples, a remote computer (e.g. aserver) can provide process recipes to a system over a network, whichmay include a local network or the Internet. The remote computer mayinclude a user interface that enables entry or programming of parametersand/or settings, which are then communicated to the system from theremote computer. In some examples, the controller receives instructionsin the form of data, which specify parameters for each of the processingsteps to be performed during one or more operations. It should beunderstood that the parameters may be specific to the type of process tobe performed and the type of tool that the controller is configured tointerface with or control. Thus as described above, the controller maybe distributed, such as by comprising one or more discrete controllersthat are networked together and working towards a common purpose, suchas the processes and controls described herein. An example of adistributed controller for such purposes would be one or more integratedcircuits on a chamber in communication with one or more integratedcircuits located remotely (such as at the platform level or as part of aremote computer) that combine to control a process on the chamber.

Without limitation, example systems may include a plasma etch chamber ormodule, a deposition chamber or module, a spin-rinse chamber or module,a metal plating chamber or module, a clean chamber or module, a beveledge etch chamber or module, a physical vapor deposition (PVD) chamberor module, a chemical vapor deposition (CVD) chamber or module, anatomic layer deposition (ALD) chamber or module, an atomic layer etch(ALE) chamber or module, an ion implantation chamber or module, a trackchamber or module, and any other semiconductor processing systems thatmay be associated or used in the fabrication and/or manufacturing ofsemiconductor wafers.

As noted above, depending on the process step or steps to be performedby the tool, the controller might communicate with one or more of othertool circuits or modules, other tool components, cluster tools, othertool interfaces, adjacent tools, neighboring tools, tools locatedthroughout a factory, a main computer, another controller, or tools usedin material transport that bring containers of wafers to and from toollocations and/or load ports in a semiconductor manufacturing factory.

What is claimed is:
 1. A substrate processing system comprising: aprocessing chamber including a top surface, a bottom surface and sidewalls; a substrate support arranged in the processing chamber to supporta substrate during processing; and a purge structure arranged in theprocessing chamber below a plane occupied by the substrate duringprocessing, wherein the purge structure includes a first plurality ofholes configured to supply purge gas to purge an area between thesubstrate support and the bottom surface of the processing chamber. 2.The substrate processing system of claim 1, wherein the first pluralityof holes directs purge gas in a downwardly direction towards the bottomsurface of the processing chamber.
 3. The substrate processing system ofclaim 1, wherein the first plurality of holes directs purge gas in adownwardly and radially outwardly direction.
 4. The substrate processingsystem of claim 1, wherein the purge structure is connected to a bottomsurface of the substrate support.
 5. The substrate processing system ofclaim 1, wherein the purge structure includes a body and a plenumdefined in the body, wherein the first plurality of holes is formed inthe body and is in fluid communication with the plenum.
 6. The substrateprocessing system of claim 1, wherein the purge structure includes abody and a cavity defined in the body, wherein the first plurality ofholes is formed in the body and is in fluid communication with thecavity, and wherein the cavity and a bottom surface of the substratesupport form a plenum.
 7. The substrate processing system of claim 1,wherein the purge structure includes an elongate member that is attachedto a bottom surface of the substrate support.
 8. The substrateprocessing system of claim 1, wherein the substrate support includes acentral supporting member connecting the substrate support to the bottomsurface of the processing chamber and wherein the processing chamberfurther includes exhaust pumping ports.
 9. The substrate processingsystem of claim 8, further comprising a pumping structure arranged belowthe substrate support and around the central supporting member, whereinthe pumping structure includes a second plurality of holes forcontrolling flow from the processing chamber through the pumpingstructure to the exhaust pumping ports.
 10. The substrate processingsystem of claim 9, wherein the pumping structure includes: a firstportion arranged around the central supporting member; and a secondportion connected to the first portion and extending from the firstportion to the side walls of the processing chamber, wherein the secondplurality of holes of the pumping structure is arranged at spacedlocations on the second portion.
 11. The substrate processing system ofclaim 10, wherein the first portion includes a cylindrical portion andthe second portion includes a planar portion.
 12. The substrateprocessing system of claim 11, wherein the planar portion has across-section to mate with a bottom portion of the processing chamberand to define a first volume in fluid communication with a reaction zoneand second volume in fluid communication with vacuum and wherein thefirst plurality of holes fluidly connects the first volume with thesecond volume.
 13. The substrate processing system of claim 1, furthercomprising a heater to heat the purge structure to a predeterminedtemperature.
 14. The substrate processing system of claim 9, furthercomprising a heater to heat the pumping structure to a predeterminedtemperature.
 15. A substrate processing system comprising: a processingchamber including a top surface, a bottom surface and side walls andexhaust pumping ports; a substrate support arranged in the processingchamber to support a substrate during processing, wherein the substratesupport includes a central supporting member connecting the substratesupport to the bottom surface of the processing chamber; and a pumpingstructure arranged in the processing chamber below the substrate supportand around the central supporting member, wherein the pumping structureincludes a first plurality of holes to control flow from the processingchamber through the pumping structure to the exhaust pumping ports. 16.The substrate processing system of claim 15, wherein the pumpingstructure includes: a first portion arranged around the centralsupporting member; and a second portion connected to the first portionand extending from the first portion to the side walls of the processingchamber, wherein the first plurality of holes of the pumping structureis arranged at spaced locations on the second portion.
 17. The substrateprocessing system of claim 16, wherein the first portion includes acylindrical portion and the second portion includes a planar portion.18. The substrate processing system of claim 15, wherein the planarportion has a cross-section to mate with a bottom portion of theprocessing chamber and to define a first volume in fluid communicationwith a reaction zone and second volume in fluid communication withvacuum and wherein the first plurality of holes fluidly connect thefirst volume with the second volume.
 19. The substrate processing systemof claim 15, further comprising a heater to heat the pumping structureto a predetermined temperature.
 20. The substrate processing system ofclaim 15, further comprising a purge structure arranged in theprocessing chamber below a plane defined by the substrate duringprocessing, wherein the purge structure includes a plenum and a secondplurality of holes configured to flow purge gas from the plenum throughthe second plurality of holes to purge an area between the substratesupport and the bottom surface of the processing chamber.